Determination of Surface Roughness by Grazing Incidence X-ray Reflectivity

Abstract

The paper presents theoretical calculations of grazing incidence X-ray reflectivity curves for iron and nickel crystals. The computer simulations based on Fresnel theory take into account damping (as the result of surface roughness), which is different from the usual Rayleigh damping. The calculations are performed for a wide range of wavelengths and roughness and also for different distribution of roughness on the surface.