Secondary ion mass spectrometry: principles and applications

Abstract

Introducing secondary ion mass spectrometry, John Vickerman the SIMS phenomenon - the experimental parameters, John Vickerman SIMS - the theoretical models, John Vickerman SIMS instrumentation, A.J.Eccles SIMS depth profiling of semiconductors, D.S.McPhail the application of static SIMS in surface science, John Vickerman static SIMS for applied surface analysis, Nicola M.Reed SIMS imaging, P.Humphrey SIMS-related techniques, John Vickerman.