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Natural SciencesPhysicsPlasma PhysicsIon ImplantationPlasma Surface TreatmentIon Implantation EffectsPlasma Immersion Ion ImplantationSurface Modification By Ion Implantation
8
W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26.6K citations
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