Chemical Vapor Deposition of Y2O3 Films Using Y(dpm)3

Volatile Metal β‐Diketonates: ALE and CVD precursors for electroluminescent device thin films

Marja Tiitta, Lauri Niinistou · Chemical Vapor Deposition · 1997 · 139 citations

Natural Sciences, Materials Engineering, Materials Science +17

Epitaxial growth of Y2O3 films on Si(100) without an interfacial oxide layer

Sunghoon Choi, M. H. Cho, S. W. Whangbo et al. · Applied Physics Letters · 1997 · 99 citations

Engineering, Materials Engineering, Materials Science +17

Synthesis of yttrium oxide thin films with and without the use of organic self-assembled monolayers

Monika Agarwal, A. H. Heuer · Applied Physics Letters · 1997 · 48 citations

Natural Sciences, Chemistry, Materials Science +17

Preparation and magneto-optic properties of Bi-substituted yttrium iron garnet thin films by metalorganic chemical vapor deposition

Masaru Okada, Shigehisa Katayama, Koji Tominaga · Journal of Applied Physics · 1991 · 42 citations

Natural Sciences, Materials Engineering, Materials Science +17