Vacuum · 2024 · 14 citations · 40 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationStructural MaterialsThin FilmsMaterial FilmThin Film AdhesionThin Film Mechanical PropertiesThin-film DepositionThin-film MaterialsMagnetron SputteringThin Film Deposition MaterialsThin-film Interface Engineering
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