Evaluation of chemical mechanical polishing characteristics using mixed abrasive slurry: A study on polishing behavior and material removal mechanism

Chemical processes in glass polishing

Lee M. Cook · Journal of Non-Crystalline Solids · 1990 · 989 citations

Natural Sciences, Chemistry, Materials Science +11

Mechanism of polishing of SiO2 films by CeO2 particles

Tetsuya Hoshino, Y. Kurata, Yuuki Terasaki et al. · Journal of Non-Crystalline Solids · 2001 · 306 citations

Natural Sciences, Materials Engineering, Materials Science +14

Green chemical mechanical polishing of sapphire wafers using a novel slurry

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Engineering, Materials Engineering, Materials Science +14

Real-Time and In Situ Monitoring of Mechanochemical Reactions: A New Playground for All Chemists

Krunoslav Užarević, Iván Halász, Tomislav Friščić · The Journal of Physical Chemistry Letters · 2015 · 191 citations

Natural Sciences, Chemical Engineering, Chemistry +13

A novel slurry for chemical mechanical polishing of single crystal diamond

Longxing Liao, Zhenyu Zhang, Fanning Meng et al. · Applied Surface Science · 2021 · 188 citations

Natural Sciences, Materials Engineering, Materials Science +12