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Performance enhancement of solar-blind UV photodetector by doping silicon in β-Ga2O3 thin films prepared using radio frequency magnetron sputtering

Electrical EngineeringEngineeringβ-Ga2o3 Thin FilmsOxide ElectronicsApplied PhysicsGallium OxideOptoelectronic DevicesRadio Frequency MagnetronThin Film Process TechnologyThin FilmsOptoelectronicsThin Film ProcessingSolar-blind Uv Photodetector