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Characterizing of a unique Al/Cu FGMMC fabricated via the ARB-CRB process followed by annealing

Materials ScienceMaterials EngineeringArb-crb ProcessAluminium NitrideEngineeringMaterial AnalysisMicrofabricationMetallic Functional MaterialApplied PhysicsUnique Al/cu FgmmcHigh-performance MaterialSemiconductor Device FabricationMicroelectronicsMicrostructure