Wear · 2024 · 18 citations · 29 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsNanotechnologySurface ScienceDefect CharacterizationDefects In Electronic MaterialsDislocation MechanicsDislocation TheorySemiconductor DefectsSemiconductor Device MaterialsDefect KineticsDefect MechanicsDislocation PhysicsScratching BehaviorSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Defects
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