Surface micromorphology and nanostructures evolution in hybrid laser processes of slicing and polishing single crystal 4H-SiC

Yuhang Li, Zhe Zhang, Zhe Zhang, Qi Song, Haiyan Shi, Yu Hou, Song Yue, Ran Wang, Shunshuo Cai, Zichen Zhang,

Journal of Material Science and Technology · 2023 · 73 citations · 41 references

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