Surfaces and Interfaces · 2023 · 27 citations · 67 references
Natural SciencesMaterials EngineeringMaterials ScienceComputational Materials ScienceGreen ChemistryMetallurgyAlloysMaterial ModelingMechanical Property SimulationMolecular DynamicsSurface ModificationSurface PhysicsChemical-mechanical Polishing CleanlinessHardening KineticsMechanical PolishingPolishingPolishing KinematicsPolishing MaterialsPolishing Processes
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