12-inch growth of uniform MoS2 monolayer for integrated circuit manufacture

Yin Xia, Xinyu Chen, Jinchen Wei, Shuiyuan Wang, Shiyou Chen, Simin Wu, Minbiao Ji, Zhengzong Sun, Zihan Xu, Wenzhong Bao,

Nature Materials · 2023 · 223 citations · 39 references

Concepts

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