Concepedia

Publication | Closed Access

Tribochemical mechanisms of abrasives for SiC and sapphire substrates in nanoscale polishing

DOI

22

Citations

41

References

2023

Year

Qiufa Luo, Jing Lu, Feng Jiang, Jia‐Ming Lin, Zige Tian
Nanoscale

Abstract

Material removal mechanisms of abrasives for SiC and sapphire in nanoscale polishing.

References

YearCitations

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