Concepedia

Atomic layer deposited high quality AlN thin films for efficient thermal management

Wangle Zhang, Jianguo Li, Jia-Bin Fang, Longfei Hui, Lijun Qin, Ting Gong, Fangyuan Sun, Hao Feng

Journal of Materials Chemistry A · 2023 · 16 citations · 51 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsHeat TransferThin FilmsAtomic Layer DepositionThermal ManagementThermal Management MaterialsThermal Properties Of MaterialsThin-film DepositionThin-film MaterialsAluminum Nitride DevicesAtomic Layer Deposition PrecursorsHigh-temperature Device OperationPower Electronics DevicesThermal Atomic Layer DepositionThermal Management Of Semiconductor DevicesThin Film Thermal Transport

Abstract

With the development of high-power devices, thermal management has become extremely important for modern electronics.

References

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