Fabrication of Fe–Fe_1−<i>x</i>O based 3D coplanar microsupercapacitors by electric discharge rusting of pure iron substrates

Abstract

. The results prove that EDR is a low-cost and versatile strategy for the scalable fabrication of high-performance patterned supercapacitor integrative electrodes and devices. Furthermore, it is a versatile technique which shows a great potential for development of next generation microelectronic devices, such as microbatteries and microsensors.