Novel green chemical mechanical polishing of fused silica through designing synergistic CeO2/h-BN abrasives with lubricity

Jie Liu, Zhenyu Zhang, Chunjing Shi, Zheng Ren, Junyuan Feng, Hongxiu Zhou, Zhensong Liu, Fanning Meng, Shuming Zhao

Applied Surface Science · 2023 · 51 citations · 48 references

Concepts

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