Accurate white light phase-shifting interferometry under PZT scanning error

Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm

P. Hariharan, B. F. Oreb, Tomoaki Eiju · Applied Optics · 1987 · 904 citations

Engineering, Ophthalmology, Measurement +10

Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain

Peter J. de Groot, L. Deck · Journal of Modern Optics · 1995 · 402 citations

Surface Height, Engineering, Microscopy +18

Efficient nonlinear algorithm for envelope detection in white light interferometry

Kieran G. Larkin · Journal of the Optical Society of America A · 1996 · 402 citations

Optical System Analysis, Phase Retrieval, Digital Envelope Detection +13

Principles of interference microscopy for the measurement of surface topography

Peter J. de Groot · Advances in Optics and Photonics · 2015 · 367 citations

Engineering, Microscopy, Mechanical Engineering +19

Step height measurement using two-wavelength phase-shifting interferometry

Katherine Creath · Applied Optics · 1987 · 259 citations