A micro graphene high temperature sensor with a single Si3N4 protective layer

Chenggang Tang, Simei Zeng, Hao Hong, Yuan Fang, Yuning Li, Yuqiang Wang, Ming‐Qiang Zhu, Jingye Sun, Tao Deng

Surfaces and Interfaces · 2023 · 17 citations · 33 references

DOIFull text

Open access

Concepts

References

33