Wake-up-mitigated giant ferroelectricity in Hf0.5Zr0.5O2 thin films through oxygen-providing, surface-oxidized W electrode

Kun Yang, Gi‐Yeop Kim, Gi‐Yeop Kim, Jin Joo Ryu, Dong Hyun Lee, Ju Yong Park, Gun Hwan Kim, Si‐Young Choi, Min Hyuk Park

Materials Science in Semiconductor Processing · 2023 · 41 citations · 51 references

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