Pixelation of GaN based Micro-LED arrays by tailoring injection energy and dose of fluorine ion implantation

Jinyu Ye, Yuyan Peng, Canlin Luo, Haonan Wang, Xiongtu Zhou, Tailiang Guo, Jie Sun, Qun Yan, Yongai Zhang, Chaoxing Wu

Journal of Luminescence · 2023 · 19 citations · 30 references

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