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Publication | Open Access

Assessing tolerances in direct write laser grayscale lithography and reactive ion etching pattern transfer for fabrication of 2.5D Si master molds

DOIFull Paper Access

18

Citations

31

References

2023

Year

Joåo Cunha, Inês S. Garcia, Joana D. Santos, José O. Fernandes, Pedro González‐Losada, C. Silva, J. Gaspar, Ana Luiza Cortez, Marcos Sampaio, D. Aguiam
Micro and Nano Engineering

References

YearCitations

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