Publication | Closed Access
Atomic Layer Etching Applications in Nano-Semiconductor Device Fabrication
31
Citations
126
References
2023
Year
Materials ScienceEngineeringNanotechnologyNanoelectronicsApplied PhysicsNano-semiconductor Device FabricationSemiconductor Device FabricationNanofabricationMicroelectronicsPlasma EtchingNanolithography Method
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