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Effects of oxygen vacancies on ferroelectric characteristics of RF-sputtered Hf0.5Zr0.5O2

DOI

19

Citations

21

References

2023

Year

Changhyeon Han, Ki Ryun Kwon, Jeonghan Kim, Jiyong Yim, Sangwoo Kim, Eun Chan Park, Ji Won You, Soi Jeong, Rino Choi, Daewoong Kwon
Materials Science in Semiconductor Processing

References

YearCitations

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