Publication | Closed Access
Utilizing mechanical micro-lever coupling structure to enhance sensitivity in mode-localized MEMS accelerometer
15
Citations
26
References
2023
Year
Mode-localized Mems AccelerometerEngineeringMeasurementMicrofabricationMechanical EngineeringAccelerometerMechanical SystemsMicroelectromechanical SystemsEducationMicroactuatorInstrumentationMicro-electromechanical System
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