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Wafer-scale integration of transition metal dichalcogenide field-effect transistors using adhesion lithography

Materials ScienceElectrical EngineeringWafer Scale ProcessingEngineeringNanoelectronicsApplied PhysicsMultilayer HeterostructuresTransition MetalSemiconductor Device FabricationMicroelectronicsWafer-scale IntegrationAdhesion LithographySemiconductor Device