Environment-friendly chemical mechanical polishing for copper with atomic surface confirmed by transmission electron microscopy

Dongdong Liu, Zhenyu Zhang, Jiajian Feng, Zhibin Yu, Fanning Meng, Chunjing Shi, Guanghong Xu, Shuyan Shi, Wei Liu

Colloids and Surfaces A Physicochemical and Engineering Aspects · 2022 · 38 citations · 38 references

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