Publication | Closed Access
High-precision and high-efficiency fabrication of blazed grating by ultrasonic-assisted ultraprecision planing
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Citations
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References
2022
Year
Materials ScienceTransient GratingEngineeringBeam LithographyMicrofabricationMechanical EngineeringUltrasonic-assisted Ultraprecision PlaningFabrication TechniqueHigh-efficiency Fabrication3D PrintingDiffractive Optic
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