An improved virtual metrology method in chemical vapor deposition systems via multitask gaussian processes and adaptive active learning

A Survey on Multi-Task Learning

Yu Zhang, Qiang Yang · IEEE Transactions on Knowledge and Data Engineering · 2021 · 2.2K citations

Computing, Computer Science, Distributed Systems +16

An Approach for Factory-Wide Control Utilizing Virtual Metrology

Aftab Aslam Parwaz Khan, James Moyne, Dawn M. Tilbury · IEEE Transactions on Semiconductor Manufacturing · 2007 · 139 citations

Engineering, Industrial Engineering, Manufacturing Engineering +17

Assessment of Data Suitability for Machine Prognosis Using Maximum Mean Discrepancy

Xiaodong Jia, Ming Zhao, Di Yuan et al. · IEEE Transactions on Industrial Electronics · 2017 · 131 citations

Computing, Data Science, Feature Engineering +16

Semi-supervised support vector regression based on self-training with label uncertainty: An application to virtual metrology in semiconductor manufacturing

Pilsung Kang, Dongil Kim, Sungzoon Cho · Expert Systems with Applications · 2016 · 100 citations

Computing, Computer Science, Manufacturing Engineering +17

Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process

Ki Bum Lee, Chang Ouk Kim · Journal of Intelligent Manufacturing · 2018 · 70 citations

Computing, Chemical Engineering, Computer Science +12