Thermodynamic Analysis of Dissolved Oxygen in a Silicon Melt and the Effect of Processing Parameters on the Oxygen Distribution in Single-crystal Silicon During Czochralski Growth

Tai Li, Liang Zhao, Guoqiang Lv, Wenhui Ma, Mengyu Zhang, Zhenling Huang, Liang Zhao

Silicon · 2022 · 19 citations · 35 references

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