Publication | Closed Access
Fabrication and properties of N-doped top layer of Ga2O3 films by magnetron sputtering
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Citations
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References
2022
Year
Materials EngineeringMaterials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsMagnetron SputteringGallium OxideChemical Vapor DepositionThin Film ProcessingGa2o3 FilmsN-doped Top Layer
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