Publication | Closed Access

Mechanical chemical polishing of large-size single-crystal diamond substrates with a sol-gel polishing tool

Materials ScienceMaterials EngineeringChemical EngineeringDiamond-like CarbonEngineeringMaterial ProcessingMicrofabricationMechanical Chemical PolishingSurface ScienceMechanical EngineeringSol-gel Polishing ToolSurface TreatmentSurface PolishingSurface Processing