Highly stretchable island‐structure metal oxide thin‐film transistor arrays using acrylic adhesive for deformable display applications

Abstract

Abstract Stretchable electronics are a promising technology for introducing new styles of display applications and for realizing displays that can be adapted to various free shapes, such as domes and spheres, to suit various viewing styles. To fabricate a stretchable display, it is necessary to form thin‐film transistors (TFTs) and light‐emitting devices on stretchable substrates. We demonstrate high‐performance stretchable metal oxide TFT islands on polyimide film using an acrylic adhesive structure. We developed mass transfer technology for metal oxide island TFTs on a polyimide film to be transferred on a stretchable substrate in a batch and a device structure with a passivation layer that stabilizes device characteristics when the substrate is stretched. The TFT showed stable switching characteristics with a mobility of 30 cm 2 /Vs without any fluctuation, even when the substrate was stretched from 0% to 50% and released to 0%.