International Journal of Heat and Mass Transfer · 2022 · 83 citations · 26 references
EngineeringMechanical EngineeringHeat TransferMicroelectromechanical SystemsMicrofabricationCooling SystemsMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidic TransportMicrofluidicsMicrochannel CoolingMicrochannel DesignMicrochannel Fabrication
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Design challenges of technology scaling
Shekhar Borkar · IEEE Micro · 1999 · 1.2K citations
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Co-designing electronics with microfluidics for more sustainable cooling
Remco van Erp, Reza Soleimanzadeh, Luca Nela et al. · Nature · 2020 · 1.1K citations · Full text
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Shekhar Borkar, Andrew A. Chien · Communications of the ACM · 2011 · 958 citations
Wafer bonding for silicon-on-insulator technologies
J. B. Lasky · Applied Physics Letters · 1986 · 574 citations