A new Kirkpatrick–Baez-based scanning microscope for the Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II

Evgeny Nazaretski, David Scott Coburn, Weihe Xu, J. Ma, Haiping Xu, R. Smith, Xiaojing Huang, Yang Yang, Lei Huang, Mourad Idir,

Journal of Synchrotron Radiation · 2022 · 22 citations · 20 references

DOIFull text

Open access

Concepts

Abstract

The development, construction, and first commissioning results of a new scanning microscope installed at the 5-ID Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II are reported. The developed system utilizes Kirkpatrick-Baez mirrors for X-ray focusing. The instrument is designed to enable spectromicroscopy measurements in 2D and 3D with sub-200 nm spatial resolution. The present paper focuses on the design aspects, optical considerations, and specifics of the sample scanning stage, summarizing some of the initial commissioning results.

References

20