Phase control of sputter-grown large-area MoTe2 films by preferential sublimation of Te: amorphous, 1T′ and 2H phases

Shogo Hatayama, Yuta Saito, Kotaro Makino, Noriyuki Uchida, Yi Shuang, Shunsuke Mori, Yuji Sutou, Miloš Krbal, Paul Fons

Journal of Materials Chemistry C · 2022 · 26 citations · 34 references

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Abstract

The crystallization mechanism of sputter-deposited amorphous Mo–Te film is revealed enabling the large-area growth of 2D materials.

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