Room-Temperature Mid-Wave Infrared Guided-Mode Resonance Detectors

Abstract

We demonstrate room temperature mid-wave infrared detectors with high peak detectivity. Our detector structures consist of type-II superlattice nBn detectors with ultra-thin ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\sim $ </tex-math></inline-formula> 250 nm) absorbers, integrated into an all-epitaxial guided-mode resonance architecture. The resulting devices show strong spectral selectivity, controlled by grating period, and low dark currents. We achieve room temperature <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\vphantom {_{\int }}$ </tex-math></inline-formula> TE-polarized peak specific detectivity ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$D^{*}$ </tex-math></inline-formula> ) of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\approx {1.2\times 10^{10}} \, {\text {cm}\sqrt {\text {Hz}}/\text {W}}$ </tex-math></inline-formula> at <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\lambda = {4.4} \,{\mu }\text {m}$ </tex-math></inline-formula> and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\approx {1\times 10^{10}} \, {\text {cm}\sqrt {\text {Hz}}/W}$ </tex-math></inline-formula> at <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\lambda = {4.7} \,{\mu }\text{m}$ </tex-math></inline-formula> , for grating periods of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\Lambda = {1.6} \, {\mu }\text{m}$ </tex-math></inline-formula> and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\Lambda ={1.8}\, {\mu }\text{m}$ </tex-math></inline-formula> , respectively. The presented all-epitaxial devices offer a unique approach to efficient room temperature mid-wave infrared detection with strong spectral and polarization selectivity.