Materials Today Proceedings · 2022 · 13 citations · 9 references
EngineeringManufacturing EngineeringMaterials ScienceMicrofabricationOpticsPhotonicsFiber OpticsLaser Material ProcessingLaser OpticsLaser PhysicsOptical FibersSilicon PhotonicsLaser MicromachiningMicromachining Of Silicon WafersSilicon Wafer ProcessingSilicon WafersSilicon Waveguides
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