Journal of Micromechanics and Microengineering · 2022 · 14 citations · 18 references
EngineeringMaterials EngineeringMaterials ScienceAcousticsMicroelectromechanical SystemsSensorsAcoustic MeasurementAcoustic SensingAcoustic Sensing SystemsAcoustic SensorsMechanical SensorsPhysical AcousticsAcoustic Pressure SensorsAcoustic Signal DetectionAcoustic Wave MeasurementMicrofabricated SensorsMicroresonatorsSensor Signal ProcessingSize
Abstract An acoustic sensor packaged with polydimethylsiloxane film sandwich structure is proposed in this paper. The sensor uses a flat glass with a square hole in the middle as the substrate structure. The cavity length of the microfiber knot resonator is significantly changed by the applied acoustic pressure, which is ultimately manifested as a change in the strength of the sensor signal. The sensor has a good response at frequencies from 0.1 to 10 kHz, and has a sensitivity of 0.92 mV Pa −1 at 1 kHz acoustic frequency. The sensor studied in this paper has the advantages of wide frequency band, small size and low cost, and has a good application prospect in the field of acoustic signal detection.
18
Subwavelength-diameter silica wires for low-loss optical wave guiding
Limin Tong, Rafael R. Gattass, Jonathan B. Ashcom et al. · Nature · 2003 · 1.5K citations
Fibre-optic micro-ring-resonator with 2 mm diameter
C. Caspar, E.-J. Bachus · Electronics Letters · 1989 · 64 citations