Corrosion Science · 2022 · 16 citations · 39 references
Materials ScienceEngineeringSurface ScienceApplied PhysicsPhysical VaporDense Oxide ScaleSemiconductor MaterialSelective Diffusion-driven OxidationSemiconductor Device FabricationThin Film Process TechnologyThin FilmsSilicon On InsulatorHf-si-b2±z Thin FilmsChemical Vapor DepositionThin Film Processing
Within physical vapor deposited Hf-Si-B2±z thin films, selective diffusion-driven oxidation of Si is identified to cause outstanding oxidation resistance at temperatures up to 1500 °C. After 60 h at 1200 °C, the initially 2.47 µm thin Hf0.20Si0.23B0.57 thin film exhibits a dense oxide scale of only 1.56 µm. The thermally induced decomposition of metastable Hf-Si-B2±z leads not only to the formation of Si precipitates within the remaining thin film (related to a non-homogenous Si distribution after the deposition) but also to pure Si layers on top and bottom of the Hf-Si-B2±z coatings next to the excellent adherend SiO2 based scales.
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General Relationship for the Thermal Oxidation of Silicon
B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations
Refractory Diborides of Zirconium and Hafnium
William G. Fahrenholtz, Gregory E. Hilmas, Inna G. Talmy et al. · Journal of the American Ceramic Society · 2007 · 2K citations