The removal of surface silica and its effect on the nitridation of high-purity silicon - Concepedia

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The removal of surface silica and its effect on the nitridation of high-purity silicon

32

Citations

4

References

1984

Year

M. N. Rahaman, A. J. Moulson

Journal of Materials Science

Materials ScienceMolecular SieveEngineeringMolecular SievingMicrofabricationSurface ScienceApplied PhysicsSiliceneHigh-purity SiliconSemiconductor Device FabricationSilicon On InsulatorSurface Silica

References

	Year	Citations

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