Publication | Closed Access
Deposition of Ti1−xAlxN using bipolar pulsed dual magnetron sputtering
19
Citations
17
References
2005
Year
Materials ScienceMaterials EngineeringEngineeringApplied PhysicsThin FilmsPulsed Laser DepositionChemical DepositionDual Magnetron SputteringThin Film Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1