Chemical Vapor Deposition · 2002 · 11 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceNanotechnologySurface ScienceThin FilmsCoatingsSurface CoatingsThin Film AdhesionThin Film Surface MorphologyThin-film DepositionThin-film MaterialsCvd CoatingsMicrowave Plasma SourcesPlasma-assisted CoatingPlasma-enhanced DepositionThin Film Deposition MaterialsThin-film CoatingsWater-repellent Coatings