Atomic layer etching chemistry of Cl2 on GaAs(100) - Concepedia

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Atomic layer etching chemistry of Cl2 on GaAs(100)

68

Citations

37

References

1992

Year

Audunn Ludviksson, Mingde Xu, Richard M. Martin

Surface Science

Materials ScienceIi-vi SemiconductorEngineeringSurface ScienceApplied PhysicsPlasma EtchingAtomic LayerCompound Semiconductor

References

	Year	Citations

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