Publication | Closed Access
Radiation damage and amorphization of silicon by 6 MeV Ni ion implantation
28
Citations
10
References
1989
Year
Materials ScienceIon ImplantationEngineeringApplied PhysicsRadiation DamageIon BeamSilicon On InsulatorIon Emission
| Year | Citations | |
|---|---|---|
Page 1
Page 1