Japanese Journal of Applied Physics · 1988 · 16 citations · 2 references
Natural SciencesElectrical EngineeringMaterials ScienceElectronic MaterialsMaterials CharacterizationSemiconductor DevicesDevice CharacterizationElectrical CharacterizationElectrical ConductivityElectronic Material CharacterizationResistance MeasurementThin Film Electrical PropertiesFour-point Probe MeasurementResistance Correction ProceduresResistivityResistivity MeasurementSheet ResistanceSheet Resistance Measurement
Experimental verification of the theoretically derived resistivity correction factor (RCF) is presented. Resistivity and sheet resistance measurements by the four-probe method are made on three samples: isotropic graphite, ITO film and Au film. It is indicated that the RCF can correct the apparent variations of experimental data to yield reasonable resistivities and sheet resistances.
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