IEEE Transactions on Magnetics · 2006 · 28 citations · 6 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsMicrofabricationMicrowave EngineeringMagnetic CharacterizationMagnetic Circuit AnalysisMagnetic Thin FilmsMicrowave Integrated CircuitsMicrowave MaterialsRadio-frequency Integrated CircuitsAnisotropy FieldCoil DesignCurrent Density DistributionFerromagnetic ResonanceHigh-frequency Magnetic ResponseInductor DesignInductorsRadiofrequency Coil Design
Five types of RF integrated spiral inductors were microfabricated and applied for the discussion of local anisotropy field distribution in the film and the local current distribution in the coil cross section, which strongly influences the frequency profile of the complex permeability, ferromagnetic resonance (FMR) frequency and inductance-capacitance (LC) resonance frequency. The shifted type inductor exhibited as high quality factor as 20.7 at 1.9 GHz because the local FMR frequency is the highest and the current distribution is most uniform among the test inductors
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