Interposer based on metallic-nanowire-membrane (MnM) for mm-wave applications

Abstract

In this paper, an innovative mm-wave technology platform is presented based on the metallic-nanowire-membrane (MnM). Here, the interposer with the most basic components are demonstrated: high performance TSVs and transmission lines showing a wide range of Zc. It was shown that it is possible to fabricate transmission lines with low and high characteristic impedances, varying from 5 Ω to 140 Ω. Highly miniaturized transmission lines can also be obtained with high quality factor (greater than 30). TSVs were fabricated with small footprint (30 μm × 20 μm) and low losses (0.05 dB/transition). These preliminary results show the promising potential of the MnM platform for the development of mm-wave devices that could include filters, couplers, feeding networks and antenna arrays.