Dominant formation and quenching processes in<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>E</mml:mi></mml:math>-beam pumped ArF and KrF lasers

Abstract

The dominant formation and quenching processes in $E$-beam pumped ArF* and KrF* lasers are discussed. The quenching of ArF* by ${\mathrm{F}}_{2}$ and Ar has been measured by analyzing the ArF* ($B^{2}\ensuremath{\Sigma}_{\frac{1}{2}}\ensuremath{\rightarrow}X^{2}\ensuremath{\Sigma}_{\frac{1}{2}}$) fluorescence as a function of the ${\mathrm{F}}_{2}$ and Ar partial pressures. We have also measured the displacement of the Ar in ArF* by Kr to form KrF*. The dominant quenching processes of KrF* were identified, and the rate constants were measured. The ArF* and KrF* are formed from the ionic states with high efficiency. Interception of the precursors can be made negligible by choosing the experimental conditions properly. The quenching of KrF* by Ar and Kr is mainly a three-body process resulting in the formation of ${\mathrm{Kr}}_{2}$F*. The emission from ${\mathrm{Kr}}_{2}$F* was observed in a broadband centered at 410 nm. We have verified that the ${\mathrm{Kr}}_{2}$F* is produced subsequent to the KrF* formation by performing a laser saturation experiment.