New high-efficiency quasi-continuous operation of a KrF(<i>B</i>→<i>X</i>) excimer lamp excited by microwave discharge

Abstract

A quasi-continuous KrF(B→X) fluorescence of &amp;gt;8 ms pulse duration with 100 Hz operation frequency was observed in a microwave discharge-pumped KrF lamp. The average KrF fluorescence power was 53 W, obtained with an intrinsic efficiency of 8.3% with a 678 W average microwave power deposition. We also obtained a peak KrF fluorescence power of 120 W with a power efficiency of 12.1%.