Micro-lens Array Fabrication by Two Photon Polymerization Technology

Abstract

This paper presents the design and fabrication of micro-lens arrays (MLAs) by Two Photon Polymerization (TPP) technology. First, a computer program is developed to construct a solid MLA model with a specified focal length and lens diameter. A TPP laser scanning path for MLA fabrication is then generated. MLAs are fabricated by TPP, with quality assessed by SEM. Finally, good quality 5*5 MLA squares with dimensions 108*108 are successfully manufactured.